s is the shear ratio of the grating shearing interferometer system), combined with a certain phase retrieval algorithm, the influence of all high-order diffraction beams on the phase retrieval accuracy is eliminated, and finally the detection accuracy of wavefront aberration for the imaging system to be tested is improved."/>
公开/公告号US10969274B2
专利类型
公开/公告日2021-04-06
原文格式PDF
申请/专利号US201916685159
申请日2019-11-15
分类号G01B9/02;G01J3/02;G01J3/10;G01J3/18;
国家 US
入库时间 2022-08-24 18:04:58