Laser ablation equipment and analyzer for inductively coupled plasma analysis

摘要

PROBLEM TO BE SOLVED: To solve a shortage of fine particles emitted from a sample ablated by laser light. SOLUTION: A laser light source (22) that outputs a laser light that ablates a sample (S) housed in a cell (11) and a laser light (22a) from the laser light source (22) are directed toward the sample (S). In the optical system (23) to be irradiated with the laser beam, the sample (S) so that the number of fine particles emitted from the sample (S) irradiated with the laser beam (22a) reaches a predetermined value per unit time A laser ablation apparatus (21) for inductive coupling plasma analysis, comprising an optical system (23) for irradiating a plurality of positions separated along the surface of S) with laser light (22a) within a unit time. [Selection diagram] Fig. 2