Force detection structure with position detection and force sensor with position detection

摘要

A force detection structure (10; 60; 70) comprising: a first end portion (12); a second end portion (14); a connecting portion (16) elastically connecting the first end portion (12) to the second end portion (14); a detection part ( 18), which detects a relative displacement between the first end section (12) and the second end section (14) accompanied by an elastic deformation of the connecting section (16) and, based on the relative displacement, outputs a detection value (D) which is used to detect a first A force component in a direction of a first axis, a second force component in a direction of a second axis orthogonal to the first axis, and a moment component about a third axis which is orthogonal to both the first axis and the second axis, a force that is used on exerting the first end portion (12) or the second end portion (14); wherein the detection part (18) comprises: two first gaps (30) which are arranged between the first end portion (12) and the second end portion (14) and are arranged to move according to a relative movement between the first end portion (12) and to change the second end portion (14); two second gaps (36) which are arranged between the first end portion (12) and the second end portion (14) at different positions than the two first gaps (30) and are designed to to change in accordance with a relative movement between the first end section (12) and the second end section (14); a first differentially detecting section (20), which in a differential manner changes the opposite in phase in the two first columns (30) corresponding to a relative movement between the first end section (12) and the second end section (14) along the first axis, detected as first movement data (d1) by changing the signals are converted into signals reversed in phase with each other and arithmetic processing is performed on the signals in a differential manner; a second differentially sensing subsection (22) that differentially detects changes that occur oppositely in phase at the two second gaps (36) corresponding to relative movement between the first end portion (12) and the second end portion (14) along the second axis , acquired as second movement data (d2) by converting the changes into signals reversed in phase with each other and performing arithmetic processing on the signals in a differential manner; anda third differentially sensing subsection (24) which differentially detects changes that are opposite in phase at the first and second gaps (30,36) corresponding to relative rotation between the first end portion (12) and the second end portion (14) by one Center axis appearing along the third axis is detected as rotation data (d3) by converting the changes into signals reversed in phase with each other and performing arithmetic processing on the signals in a differential manner so that the detecting part (18) receives the Outputs detection value (D) based on the first movement data (d1), the second movement data (d2) and the rotation data (d3).