Position detection apparatus that detects a position of an object by detecting light from a scale, and lithography apparatus, force sensor, and apparatus having force sensor including the position detection apparatus

摘要

The present invention provides a position detection apparatus that is provided with a scale and a detector and includes a processing unit configured to perform processing for setting a number of light receiving elements that are consecutive in a direction of relative movement and whose outputs are to be added for the light receiving elements so that, in a first resolution mode, a phase of a component of a fourth spatial frequency lower than a spatial frequency corresponding to a frequency offset amount is detected and, in a second resolution mode for which a resolution is lower than the first resolution mode, a phase of a component of a spatial frequency of an interference image of a second grating pattern is detected.