MANUFACTURING PROCESS FOR MULTI-PIXEL GAS MICROSENSORS WITH MULTIPLE SENSING CAPABILITIES

摘要

The present invention relates to a method for manufacturing multi-pixel gas microsensors, wherein each multi-pixel gas microsensor comprises at least a first pixel group having a first sensing material and a second pixel group having a second sensing material different from the first material. The method comprises a first step of providing a wafer substrate and processing the wafer substrate for building a plurality of multi-pixel microsensors having first and second groups of pixels, a second step of selecting sensing materials for each of the groups of pixels, and a third step of activation of the first and the second pixel group by coating electrode pairs of the first and second pixel group with the corresponding sensing materials selected.