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COMPOSITE METAL OXIDE SEMICONDUCTOR AND THIN-FILM TRANSISTOR MADE THEREFROM AND ITS APPLICATION
COMPOSITE METAL OXIDE SEMICONDUCTOR AND THIN-FILM TRANSISTOR MADE THEREFROM AND ITS APPLICATION
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机译:复合金属氧化物半导体和由此制成的薄膜晶体管及其应用
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摘要
The present application discloses a composite metal oxide semiconductor which is a metal oxide semiconductor doped with a rare earth oxide. Even doping the praseodymium oxide or ytterbium oxide at a small doping amount, oxygen vacancies could be suppressed as well as the mobility be maintained; critically, the thin-films made thereof can avoid the influence of light on I-V characteristics and stability, which results in great improvement of the stability under illumination of metal oxide semiconductor devices. The present application also disclose the thin-film transistors made thereof the composite metal oxide semiconductor and its application.
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