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METHOD FOR FORMING A FUNCTIONALISED ASSEMBLY GUIDE AND PROCESS OF GRAPHO-EPITAXY
METHOD FOR FORMING A FUNCTIONALISED ASSEMBLY GUIDE AND PROCESS OF GRAPHO-EPITAXY
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机译:形成功能化组装指南的方法和Grapho-Exitaxy的方法
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摘要
A method for forming a functionalised assembly guide intended for the self-assembly of a block copolymer by graphoepitaxy, includes forming on the surface of a substrate a neutralisation layer made of a first material having a first neutral chemical affinity with regard to the block copolymer; forming on the neutralisation layer a first mask including at least one recess; depositing on the neutralisation layer a second material having a second preferential chemical affinity for one of the copolymer blocks, in such a way as to fill the at least one recess of the first mask; and selectively etching the first mask relative to the first and second materials, thereby forming at least one guide pattern made of the second material arranged on the neutralisation layer.
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