Laminated structure, semiconductor device and semiconductor system

摘要

SubjectIt is an object of the present invention to provide a laminated structure having a crystalline oxide film having a low electrical resistivity and thermally stable and suitable for a semiconductor device.SolutionA multilayer structure having a substrate and a crystalline oxide film having a beta gas structure, wherein the substrate is a single crystal substrate comprising lithium tantalate as the main component, and the crystalline oxide film contains a dopant and has an electrical resistivity of 50 M.OMEGA. Cm or less.Diagram