Laminated structure, semiconductor device, and manufacturing method of laminated structure

摘要

SubjectThe purpose of this invention is to provide an inexpensive laminated structure having a crystalline oxide film which is thermally stable and has a smooth film surface and has a large carrier mobility.SolutionA layered structure having a crystalline substrate, and a crystalline oxide film having gallium and a beta alloy structure, wherein the crystalline substrate is a single crystal substrate mainly composed of lithium tantalate and has an off angle of 0.2 ° to 18.0 °.Diagram