Method for controlling convection pattern of silicon melt and method of manufacturing silicon single crystal

摘要

Control method of convection pattern of silicon meltObtaining the temperature of the first measuring point which is not overlapped with the rotation center of the quartz crucible at the surface of the silicon melt in the quartz crucible rotating in the no magnetic field state, andThe step of confirming that the temperature of the first measurement point is a period change andAt the timing at which the temperature change of the first measurement point becomes a predetermined stateThe driving of the magnetic field applying portion is started, and a horizontal magnetic field is applied to the silicon melt.After thatUp to 0.2 TeslaIt is provided with a step of fixing the direction of convection in a plane perpendicular to the applied direction of the horizontal magnetic field in the silicon melt.