ANALYSIS METHOD OF PHYSICAL PROPERTIES OF GRAPHENE

摘要

The present invention relates to a method for analyzing the physical shape of graphene. In the method of analyzing the physical shape of graphene of the present invention, a silicon substrate having a plurality of fine grooves is prepared, and a sample having graphene and a metal coating film is formed on the silicon substrate, and then a scanning electron microscope (SEM) device is used. However, since the silicon substrate has a flat bottom and various inclination angles, physical properties such as thickness, width, diameter, wrinkle, and flatness related to the graphene shape can be analyzed using SEM equipment.