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TRANSISTOR HAVING HIGH WITHSTAND VOLTAGE AND HIGH ELECTRON MOBILITY AND PREPARATION METHOD THEREFOR

机译:具有高耐电压和高电子迁移率的晶体管及其制备方法

摘要

A transistor having high withstand voltage and high electron mobility and a preparation method therefor. The transistor having high withstand voltage and high electron mobility comprises: gate electrodes (108), source electrodes (107), a drain electrode (106), a barrier layer (105), a channel layer (104), a nucleation layer (103), and a substrate (101). The channel layer (104) is located between the barrier layer (105) and the substrate (101). The channel layer (104) comprises a P-type III-V group semiconductor layer, wherein the projection of the nucleation layer (103) on the substrate (101) overlaps at least part of that of the drain electrode (106), the drain electrode (106) is in electrical contact with the two-dimensional electron gas of the channel layer (104), the source electrodes (107) are in electrical contact with the P-type III-V group semiconductor layer, and the gate electrodes (108) are located on the barrier layer (105).
机译:具有高耐压和高电子迁移率的晶体管及其制备方法。具有高耐电压和高电子迁移率的晶体管包括:栅电极(108),源电极(107),漏电极(106),阻挡层(105),沟道层(104),核切割层(103 )和基板(101)。沟道层(104)位于阻挡层(105)和基板(101)之间。沟道层(104)包括P型III-V组半导体层,其中核心层(103)在基板(101)上的突出物重叠漏电极(106)的至少一部分,排水管电极(106)与通道层(104)的二维电子气体电接触,源电极(107)与P型III-V组半导体层和栅电极电接触( 108)位于阻挡层(105)上。

著录项

  • 公开/公告号WO2021035946A1

    专利类型

  • 公开/公告日2021-03-04

    原文格式PDF

  • 申请/专利权人 GUANGDONG ZHINENG TECHNOLOGY CO. LTD.;

    申请/专利号WO2019CN115426

  • 发明设计人 LI ZILAN;

    申请日2019-11-04

  • 分类号H01L29/778;

  • 国家 CN

  • 入库时间 2022-08-24 17:33:11

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