PIEZOELECTRIC ENERGY HARVESTING DEVICE AND MANUFACTURING METHOD THEREOF

摘要

The present invention relates to a piezoelectric energy harvesting device and a method of manufacturing the same. Piezoelectric energy harvesting device according to an embodiment of the present invention, the substrate; A first electrode formed on the substrate; A piezoelectric layer formed on the first electrode and containing an inorganic halide; And a piezoelectric energy harvesting device including a second electrode formed on the piezoelectric layer.