Imprint Mold Substrate, Imprint Mold, and Imprint Mold Substrate Manufacturing Method

摘要

PROBLEM TO BE SOLVED: To provide an imprint mold substrate, an imprint mold, and a method for manufacturing an imprint mold substrate having a highly accurate convex structure portion. An imprint mold substrate includes a base portion having a first surface and a second surface facing the first surface, and a convex structure portion protruding from the first surface, and the convex structure portions are first to N (1st to N). It has a substantially N-square-shaped upper surface portion having N ≧ 3) sides and a round-shaped side wall portion connecting the outer periphery of the upper surface portion and the first surface, and is located on the M (1 ≦ M ≦ N) side. The protrusion height HM of the convex structure portion and the length WM between the M side in the plan view from the first surface side and the connecting portion connecting the side wall portion and the first surface are expressed in the equation (1). Has the relationship shown. −0.1HM ≦ HM −WM ≦ 0.1HM ・ ・ ・ (1) [Selection diagram] FIG. 1A