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IMPRINT MOLD, BLANKS FOR IMPRINT MOLD, METHOD FOR MANUFACTURING IMPRINT MOLD SUBSTRATE, AND METHOD FOR MANUFACTURING IMPRINT MOLD
IMPRINT MOLD, BLANKS FOR IMPRINT MOLD, METHOD FOR MANUFACTURING IMPRINT MOLD SUBSTRATE, AND METHOD FOR MANUFACTURING IMPRINT MOLD
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机译:印模,印模坯料,制造印模基体的方法和制造印模的方法
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摘要
To provide an imprint mold capable of removing a fine uneven pattern by polishing treatment without worsening flatness of an upper surface of a convex structure part, blanks for imprint mold, a method for manufacturing an imprint mold substrate, and a method for manufacturing an imprint mold.SOLUTION: An imprint mold 1 comprises a base part 2 including a first surface 2A and a second surface 2B facing the first surface 2A, a convex structure part 3 and a convex part 4 protruding from the first surface 2A, and a fine uneven pattern 5 formed on an upper surface 3A of the convex structure part 3. The convex part 4 is located around the convex structure part 3 in a plan view from a first surface 2A side. A height Tof the convex part 4 is substantially the same as a height Tof the convex structure part 3.SELECTED DRAWING: Figure 1
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