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Method of formation of a boss of the ohmic contact by electrolytic deposition on a block of semi conducting -
Method of formation of a boss of the ohmic contact by electrolytic deposition on a block of semi conducting -
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机译:通过在一块半导体上进行电解沉积形成欧姆接触凸台的方法-
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摘要
An ohmic contact bump, e.g. of Ag, Au, Cu, Ni or Co, is electroplated upon a semi-conductor body, e.g. of Si or Ge and preferably through apertures in a protective SiO2 mask thereon, in a plating bath into which ultrasonic energy is introduced. The D.C. may be increased in steps during plating.
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