Method of determining resistivity

摘要

1,086,034. Resistance measurement. MOTOROLA Inc. June 16, 1966 [July 8, 1965], No.26998/66. Heading G1U. The resistivity of a thin film on a conductive or semi-conductive substrate (e.g. an epitaxial transistor) is measured by applying a constant current to a pair of contacts of significant area and measuring the voltage developed between them. The contacts may both be on the thin film Fig. 1 (not shown), or alternately Fig. 2 (not shown) one contact may be on the film and the other one on the other side of the substrate.