Doped silicon monocrystal prodn - by using a seed crystal to draw a rod shaped single crystal uniformly doped with a pre-determined amt of antimony

摘要

Entire length of rod is uniformly doped by using a seed crystal to draw the monocrystal from a melt of silicon with a predetermined antimony content. The drawing process is carried out in an evacuable reaction vessel and in a protective gas atmosphere at sub-atmospheric pressure, part of the antimony being evaporated from it during the drawing process.