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method for the electrochemical evolution of irradiated by heavy charged particles formed latent tracks in a wafer from an insulating substance and device for its implementation

机译:于由绝缘物质在晶片中形成潜迹的重带电粒子辐照进行电化学放出的方法及其实现装置

摘要

The insulation material plate is stamped between the flat walls of two Teflon (RTM) vessels each with a hole in the wall adjoining the plate and using Teflon O ring seals. The vessels are filled with electrolyte and each contains an electrode separated from the plate, an adjustable frequency and voltage square or sine wave being applied across the electrodes.
机译:绝缘材料板被压印在两个特富龙(RTM)容器的平壁之间,每个容器的壁上都有一个孔,与该板相邻,并使用特富龙O形圈密封。容器中装有电解质,每个容器都包含一个与极板分开的电极,在电极之间施加可调节的频率和电压方波或正弦波。

著录项

  • 公开/公告号DE2133604A1

    专利类型

  • 公开/公告日1972-01-20

    原文格式PDF

  • 申请/专利权人 COMITATO NAZIONALE PER LENERGI;

    申请/专利号DE19712133604

  • 发明设计人

    申请日1971-07-06

  • 分类号G01T5/10;

  • 国家 DE

  • 入库时间 2022-08-23 08:18:45

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