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method for the electrochemical evolution of irradiated by heavy charged particles formed latent tracks in a wafer from an insulating substance and device for its implementation
method for the electrochemical evolution of irradiated by heavy charged particles formed latent tracks in a wafer from an insulating substance and device for its implementation
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机译:于由绝缘物质在晶片中形成潜迹的重带电粒子辐照进行电化学放出的方法及其实现装置
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摘要
The insulation material plate is stamped between the flat walls of two Teflon (RTM) vessels each with a hole in the wall adjoining the plate and using Teflon O ring seals. The vessels are filled with electrolyte and each contains an electrode separated from the plate, an adjustable frequency and voltage square or sine wave being applied across the electrodes.
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