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Mesa type diode semiconductor structure - has reduced mesa part and has highly doped residual substrate of small thickness

机译:台面型二极管半导体结构-减少了台面部分并具有小厚度的高掺杂残留衬底

摘要

The semiconductor structure includes a diode of the mesa type and a block of dielectric material. The dielectric material has larger dimensions than that of the mesa part of the diode. The dielectric material block (10) has two large plane and parallel faces each carrying metallised areas (3, 4). The diode (10) which is reduced at its mesa part has a highly doped residual substrate. The thickness of this substrate is small with respect to the thickness of the mesa part. The diode is buried in the dielectric block so that its residual substrate is in contact with one of the metal areas on the largest face. A metal contact (5) of good heat and electrical conducting properties ensures the connection through the block between the opposite face of the substrate and the metal area of the blocks other largest face.
机译:半导体结构包括台面型二极管和电介质材料块。介电材料具有比二极管的台面部分更大的尺寸。介电材料块(10)具有两个大的平面和平行面,每个面都带有金属化区域(3、4)。在其台面部分被还原的二极管(10)具有高度掺杂的残留衬底。该基板的厚度相对于台面部分的厚度小。二极管埋在介电块中,以便其残留衬底与最大面上的金属区域之一接触。具有良好导热和导电性能的金属触点(5)可确保通过垫块在基板的相对面与另一个最大面的垫块的金属区域之间进行连接。

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