Integrated circuit system tested by electron or laser beam - has signal inputs of partial circuits coupled to bistable auxiliary circuits, set by electron or laser beam

摘要

The tested integrated circuit consists of a number of partial circuits and is used for processing binary signals. The signal inputs (a, b, c) of the partial circuits are connected to bistable auxiliary circuits, set by an electron, or laser beam. The auxiliary circuits are formed by a lateral pnp-transistor and a vertical npn-transistor. Each base of one transistor is coupled to the collector of the other one. Preferably all signal outputs of the partial circuits are coupled to a common interrogation line via individual phototransistors. The auxiliary circuits may be incorporated between the signal inputs and the supply voltage source pole (VEE) on the emitter side.