Reference image for the alignment of masks for the production of microcircuits, a method for aligning a mask with a microprocessor circuit disk and a method and apparatus for sensing and aligning of such reference images

摘要

A target for use in aligning masks used in producing microcircuits which is of a size that can be printed on a microcircuit chip without interfering with the lines thereon, consisting only of lines vertically or diagonally disposed with respect to the image transducer is disclosed. Also disclosed is an automatic system for aligning such targets.