首页> 外国专利> BLIND, AN EXPOSURE DEVICE INCLUDING THE SAME, AND A METHOD FOR DRIVING THE EXPOSURE DEVICE CAPABLE OF ALIGNING A MASK AND A SHIELDING PLATE ON REFERENCE POSITIONS BY USING ALIGNMENT MARKS

BLIND, AN EXPOSURE DEVICE INCLUDING THE SAME, AND A METHOD FOR DRIVING THE EXPOSURE DEVICE CAPABLE OF ALIGNING A MASK AND A SHIELDING PLATE ON REFERENCE POSITIONS BY USING ALIGNMENT MARKS

机译:百叶窗,包括其的曝光设备以及通过使用对准标记来驱动能够在参考位置上对面膜和掩蔽板进行配平的曝光设备的方法

摘要

PURPOSE: A blind, an exposure device including the same, and a method for driving the exposure device are provided to simplify operational processes and to prevent gap smudge from being generated on a substrate.;CONSTITUTION: A blind(530) includes a shielding plate and a first adjusting part. The shielding plate shields light in an exposure process. Alignment marks(546a, 546b) are formed at both end parts of the shielding plate. The first adjusting part is fixed to the first end part of the shielding plate to adjust the position of the shielding plate. The shielding plate includes transparent window parts(536a, 536b), and each alignment mark is formed at each window part. The first adjusting part rotates the shielding plate to adjust the tilted angle of the shielding plate.;COPYRIGHT KIPO 2013
机译:目的:提供一种百叶窗,包括该百叶窗的曝光装置以及驱动该曝光装置的方法,以简化操作过程并防止在基板上产生间隙污迹。组成:百叶窗(530)包括一块屏蔽板和第一调整部分。屏蔽板在曝光过程中屏蔽光。在屏蔽板的两个端部形成对准标记(546a,546b)。第一调节部固定到遮蔽板的第一端部以调节遮蔽板的位置。遮蔽板包括透明的窗口部分(536a,536b),并且每个对准标记形成在每个窗口部分上。第一调节部分旋转遮蔽板以调整遮蔽板的倾斜角度。; COPYRIGHT KIPO 2013

著录项

  • 公开/公告号KR20120113434A

    专利类型

  • 公开/公告日2012-10-15

    原文格式PDF

  • 申请/专利权人 SAMSUNG DISPLAY CO. LTD.;

    申请/专利号KR20110031140

  • 发明设计人 KIM CHANG HOON;YOO HONG SUK;SEO KAB JONG;

    申请日2011-04-05

  • 分类号G03F7/20;H01L21/027;

  • 国家 KR

  • 入库时间 2022-08-21 17:08:58

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