METHOD FOR CONFIRMING REFERENCE IMAGE METHOD FOR INSPECTING MASK AND APPARATUS FOR INSPECTING MASK

摘要

The reference circuit 24 generates a reference image based on a comparison of the design data of the mask 2 and the optical image of the mask 2 in the first predetermined region of the mask 2 having the pattern, and generates the generated reference image. The validity of the reference image is confirmed, and the validation of the validity of the reference image is a confirmation region where the additional circuit confirms the validity of the reference image, in addition to the first region previously set as the confirmation region, the mask 2 And adding a second area of the device, and confirming whether or not the reference image is valid in the confirmation area including the first area and the second area.