SINGLE CRYSTAL GROWING APPARATUS BY FLOATING ZONE MELTING METHOD

摘要

PURPOSE:To prevent the heating efficiency of the titled growing apparatus from lowering owing to the scattering of an evaporated substance by coaxially arranging a predetermined cylindrical gas introduction pipe and a predetermined cylindrical gas exhaust pipe around a starting material rod and a grown crystal rod, respectively. CONSTITUTION:Nitrogen gas as an atmospheric gas is passed through transparent quartz pipe 6 from the lower end, and upper and lower cylindrical quartz pipes 7, 8 are arranged in pipe 6. Nitrogen gas is fed into lower pipe 8 and exhausted from upper pipe 7. By this construction an evaporated substance can be prevented from sticking to pipe 6, and the efficiency of heating melt zone 5 with a luminous lamp (not shown) can be prevented from lowering.