WORK HOLDER HOLDING APPARATUS IN BOTH-SIDE LAPPING, POLISHING AND FINE GRINDING INCLUDING ELECTRICAL AND CHEMICAL POLISHING

摘要

PURPOSE:To enable the processing of an ultra-thin object to be processed, by simultaneously holding a work holder of a both-side lapping machine or the like by an outside holding apparatus and an inside holding apparatus. CONSTITUTION:The upper plate 4 of a both-side lapping machine, a polishing machine and a fine grinding machine including electrical and chemical polishing polishes the upper surface of an object 6 to be processed by the rotary and the presssing actions of an upper drive shaft 5 and the lower plate 7 polishes the under surface of the object 6 to be processed by the rotation and the pressure of a lower drive shaft 8. In this case, the work holder 1 of the object 6 to be processed is held by drawing force of an outside holding apparatus 2 as well as held by an inside holding apparatus 3 to make it possible to use the work holder thinner than a conventional one and to enable the processing of an ultra-thin object to be processed.