PURPOSE:To obtain the extra-high accuracy resist spinner, which can form uniform film thickness at all times, by transporting a resist solution to a head pipe for application through a gas medium heat-exchange chamber and a viscometer from a resist tank thermostatic chamber while keeping the temperature of the resist solution constant and driving a spin motor through a feedback mechanism in response to the value of viscosity by the viscometer. CONSTITUTION:Cooling air and hot air are controlled at the temperature of a hot air-cooling air mixing chamber 16 through detection by a thermocouple 15, and the mixed air of cooling air and hot air is introduced into the resist tank thermostatic chamber 11 through an introducing pipe 17 when their temperature reaches a fixed temperature. The resist solution received into the tank 11 is forwarded by pressure by the gas of a compressed gas pipe, and forwarded to the resist applying head pipe 44 through the gas medium heat-exchange chamber 22, a pump 31, a filter 32, a gas medium heat exchanger 34 and the viscometer 43 from a resist transport pipe 20. The gas does not dew-condense in the chamber 11 because it has the low dew point. The value of viscosity measured by the viscometer 43 is transmitted to the spin motor 46 through a feedback mechanism 47 at that time, and the number of revolution set is adjusted minutely.
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