Method and apparatus for forming of contacts in the case of the contact copying

摘要

PURPOSE:To realize a good state of contact, by making one body curved from the center part against the other body, and subsequently moving one supporting means in the direction crossing the contact face to contact tightly up to the circumferential part. CONSTITUTION:After the position alignment of a mask 1 and a wafer 3 is completed, a feed screw 5 is rotated by a step-motor 6, and an up-and-down moving member 9 is lifted. At the same time, a wafer chuck 4 rises in a state of holding the wafer 3, and the wafer 3 is firmly fixed to a position separated at a prescribed interval from the mask 1. Subsequently, the inside of a vacuum chamber 8 is deaerated through a conduit 7, the mask and the wafer start to contact, and the mask is largely curved and contacts closely from the vicinity of the center. Subsequently, as vacuum pressure is raised, the contact area expands. After that, the screw 5 is rotated by the motor 6, and the wafer 3 held on the chuck 4 through the member 9 is lifted up to a position where the gap quantity against the mask 1 is very small. As a result, bending of the mask is eliminated, and the degree of contact of the circumferential part can be increased.