HIGH SATURATION MAGNETIZATION AND HIGH PERMEABILITY MAGNETIC FILM

摘要

PURPOSE:To obtain the magnetic film having high saturation magnetization and high permeability characteristics required for forming a thin-film magnetic head by bringing Zr and Co in a magnetic substance material consisting of Zr and Co to a specific composition ratio. CONSTITUTION:A target, which consists of Zr and Co and contains 4.5- 15atom% Zr, is used, opposite substrates are sputtered under the state in which the substrates are kept at a low temperature (100 deg.C or less), and the magnetic films consisting of amorphous Zr and Co and formed on the insulating substrates such as alumina. A magneto-static field of 50 oersted or more is applied to a film surface during coating. The magnetic film is thermally treated in a revolving magnetic field, and permeability is improved. When the quantity of Zr added is increased, the saturation magnetization of the magnetic film reduces, and resistivity rho increases.