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Method and apparatus for the determination of the family of finely position state of an optical imaging system
Method and apparatus for the determination of the family of finely position state of an optical imaging system
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机译:用于确定光学成像系统的精细位置状态族的方法和设备
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摘要
a device for determining the scharfeinstellungszustandes an optical abbildungssystems (1) has a first and a second sensorzeile (12a, 12b) composed of several light sensors before and behind a fixed fo
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