The capacitive transducer of the pressure in the silicon bound by electrostatic

摘要

The invention relates to a pressure transducer capacitive to the silicon bound by electrostatic. / p & & p & this transducer 10 comprises two pieces of silicon, 11, 14, at least one is fashioned of a to define a separate conductive surface, on one of these pieces 11, 14 a, close to a surface conductive willing on the other piece. A thin layer of borosilicate glass 16, 17 is wrapper on one of the surfaces above. / p & & p & the invention is used in order to avoid the priming of an arc in a pressure transducer capacitive.