首页>
外国专利>
Method for forming high superconducting T.sub.c niobium nitride film at ambient temperatures
Method for forming high superconducting T.sub.c niobium nitride film at ambient temperatures
展开▼
机译:在环境温度下形成高超导碳化三铌铌薄膜的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
A method of forming a high T.sub.c niobium nitride (NbN) film on a substrate at ambient substrate temperature. The method includes the step of reactively sputtering NbN onto the substrate in an argon-nitrogen atmosphere with controlled amounts of methane added to the argon-nitrogen gas mixture.
展开▼