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MULTIPLE SEXTUPOLE SYSTEM FOR THE CORRECTION OF THIRD AND HIGHER ORDER ABERRATION
MULTIPLE SEXTUPOLE SYSTEM FOR THE CORRECTION OF THIRD AND HIGHER ORDER ABERRATION
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机译:修正三阶和更高阶像差的多重曲面系统
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摘要
ABSTRACTA means is provided for compensating for third andhigher order aberration in charged particle beam devices.The means includes two sextupoles with an intermediatefocusing lens, all positioned between two focusing lenses.
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