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Multiple sextupole system for the correction of third and higher order aberration
Multiple sextupole system for the correction of third and higher order aberration
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机译:多重六极系统,用于校正三阶和更高阶像差
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摘要
A means is provided for compensating for third and higher order aberration in charged particle beam devices. The means includes two sextupoles with an intermediate focusing lens, all positioned between two focusing lenses.
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