PENETROMETER WITH SCANNING ELECTRON MICROSCOPE

摘要

PURPOSE:To measure even a very small hollow accurately by a simple operation without shifting a sample, by a method wherein an electron beam is irradiated in a direction crossing a load axis of a loading means of a penetrometer. CONSTITUTION:A lens-barrel 18 is disposed toward a sample room SR so that a gravity direction A coincides with an axial direction of an electron beam EB irradiated to a surface of a sample 2 on a sample table 3. A leaf spring 4 is disposed and adjusted so as to be parallel with the surface of the sample when a penetrator 5a provided at the lower end of a load axis 5 abuts on the surface of the sample 2. At the same time when the electron beam EB is irradiated to the sample 2, a detector 25 detects secondary electron, sample current etc. generated from the sample 2. Signals detected are applied to a cathode ray tube 27 through an amplifier 26, which displays an image of a hollow on the surface of the sample 2. Accordingly, by the present penetrometer, even a very small hollow can be measured accurately by a simple operation without shifting the sample.