Improvementsin sensitivity of a positive polymer resist having a glass transition temperature through control of a molecular weight distribution and prebaked temperature

摘要

The present invention is a method to increase the sensitivity of a positive polymer resist by control of molecular weight distribution and prebake temperature. The sensitivity of a polymer positive resist is increased by baking a narrow molecular weight fraction resist below the glass transition temperature. More particularly the sensitivity is increased by the use of low average molecular weight resist of narrow molecular weight distribution.