Improvements in contrast and sensitivity of a positive polymer resist having a glass transition temperature.

摘要

A method of increasing the contrast or sensitivity of positive polymer resist by baking a narrow molecular weight fraction resist coated on a substrate, the temperature of baking being below the glass transition temperature. A suitable polymer is poly (methylmethacrylate) and the fraction positive polymer resist can have 1 Mw/Mn 1.5 where Mw = weight average molecular weight and Mn = number average molecular weight.