MANUFACTURE OF HUMIDITY SENSOR WITH TEMPERATURE COMPENSATION OR HUMIDITY AND TEMPERATURE SENSOR

摘要

PURPOSE:To manufacture a humidity sensor with temperature compensation or humidity and temperature sensor by coating a thermistor for temperature compensation or thermistor for temperature and humidity compensation with glass and then forming a humidity sensing film. CONSTITUTION:A lead electrode 1 is formed by screen printing, and dried and baked. A comb-shaped electrode 2 is also formed by screen printing, and dried and baked. Further, a thermistor part 3 is formed by screen printing, and dried and baked. The thermistor part 3 is coated with glass, which is dried and baked. A humidity sensing material 4 is formed on the electrode 2 by screen printing, and dried and baked. Cycle aging is carried out in a constant-temperature and constant-humidity chamber to manufacture the humidity sensor with temperature compensation or humidity and temperature sensor with temperature compensation as a composite sensor.