PRODUCTION OF THIN LEAD LANTHANUM TITANATE ZIRCONATE FILM

摘要

PURPOSE:To stably form a good and thin lead lanthanum titanate zirconate film with good accuracy in a multi-element sputtering method by covering part of the surface of a Pb target with Ti or Zr. CONSTITUTION:Targets 1, 2, 3, 4 consisting of Ti, Zr, Pb, La are used in the multi-element sputtering method. Part of the surface of the Pb targent 3 among these targets is coated with an auxiliary target 5 consisting of Ti or Zr. Independent high voltage power sources 9 are connected to the targets 1, 2, 3, 4 to impress respectively adequate electric powers thereto so that the intended thin lead lanthanum titanate zirconate film is formed on the surface of a substrate 6. The adequate limitation of the evaporation rate of Pb is made possible by increasing the area of the auxiliary target 5 even if the sputtering rate of the Pb target 3 is high. The thin film having the adequate component ratios is thus obtd. in spite of the impression of the large electric power.