LOW-ENERGY SCANNING TRANSMISSION ELECTRON MICROSCOPE

摘要

ABSTRACTLOW-ENERGY SCANNING TRANSMISSION ELECTRON MICROSCOPELow-energy scanning transmission electron microscopyis achieved by using a sharply pointed electrode asa source of electrons having energies less than 10eV and scanning the electron emitting pointed sourceacross the surface of a self-supported thin film ofmaterial to be investigated at an essentiallyconstant distance on the order of nanometers. Theelectrons transmitted through the specimen aresensed by a suitable detector and the output signalof the detector is used to control a display unit,such as a CRT display or a plotter. A scanningsignal generating means simultaneously controls boththe scanning of the electron emitting point sourceand the display unit while a separation control unitholds the distance between the point source andsurface at a constant value. The electron emittingpoint source and associated mechanical drives aswell as the specimen film and electron detector areall positioned in a vacuum chamber and isolated fromvibration by a damped suspension apparatus.