Electrostatic accelerometer with produced by means of micromachining rueckstellung.

摘要

The accelerometer according to the invention uses at least one sensor a pendulum structure flat completed by micro - machining of a thin plate 1 of a single crystal and comprising a flat moving mass 3 suspended from the rest of the structure by means of two parallel thin blades 4, 5 located on either side of said masse3. This mass 3 comprises at least one movable plate of capacitor willing between two fixed plates of capacitor provided on the fixed part of the pendular element. The movable armature is reach a voltage v, while the fixed plates are respectively litters a of the voltages v and v, which are capable of generating, on the moving mass 3, a return force electrostatic. / p & & p & thanks to the simplicity of this structure and of this type of motor, it is possible to obtain highly miniaturized accelerometers.