机译:微机械介入光学加速度计的回顾:从MG到Sub-μg
Frontiers Science Center for Flexible Electronics(FSCFE) Shaanxi Institute of Flexible Electronics(SIFE)&Shaanxi Institute of Biomedical Materials and Engineering(SIBME) Northwestern Polytechnical University Xi''an 710072 ChinaMIIT Key Laboratory of Flexible Electronics(KLoFE) Northwestern Polytechnical University Xi’an 710072 China;
The Key Laboratory of Information Fusion Technology Ministry of Education School of Automation Northwestern Polytechnical University Xi''an 710072 China;
The Key Laboratory of Information Fusion Technology Ministry of Education School of Automation Northwestern Polytechnical University Xi''an 710072 China;
Wuhan National Laboratory for Optoelectronics-Huazhong University of Science and Technology Wuhan 430074 China;
Frontiers Science Center for Flexible Electronics(FSCFE) Shaanxi Institute of Flexible Electronics(SIFE)&Shaanxi Institute of Biomedical Materials and Engineering(SIBME) Northwestern Polytechnical University Xi''an 710072 ChinaMIIT Key Laboratory of Flexible Electronics(KLoFE) Northwestern Polytechnical University Xi’an 710072 China;
Frontiers Science Center for Flexible Electronics(FSCFE) Shaanxi Institute of Flexible Electronics(SIFE)&Shaanxi Institute of Biomedical Materials and Engineering(SIBME) Northwestern Polytechnical University Xi''an 710072 ChinaMIIT Key Laboratory of Flexible Electronics(KLoFE) Northwestern Polytechnical University Xi’an 710072 China;
accelerometer; Micro-Opto-Electro-Mechanical Systems(MOEMS); integrated optics; accelerometer review;