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Passivation for surfaces and interfaces of semiconductor laser facets or the like

机译:半导体激光刻面等的表面和界面的钝化

摘要

A passivating layer is deposited on the facet of a light emitting device comprising a thin layer of a reactive material. The thickness of the passivating layer is sufficiently thick to react with an optimum amount of contaminants on the facet but is sufficiently thin so as to be consumed in the gettering process and render the layer electrically nonconductive, if initially conductive in nature. The reactive material may be selected from the group consisting of Al,Si,Ta,V, Sb,Mn,Cr and Ti. Al has been found to be particularly good as a passivating layer with a preferred thickness for the layer being in the range of about 20Å to 75Å, depending upon whether the layer is for purposes of surface passivation or interface passivation.
机译:钝化层沉积在包括反应性材料薄层的发光器件的小面上。钝化层的厚度足够厚以与小平面上的最佳数量的污染物反应,但是钝化层的厚度足够薄以便在吸气过程中被消耗,并使该层不导电(如果本质上最初是导电的)。反应性材料可以选自Al,Si,Ta,V,Sb,Mn,Cr和Ti。已经发现,Al作为钝化层特别好,该层的优选厚度在约20;范围内。至75 75,取决于该层是用于表面钝化还是用于界面钝化。

著录项

  • 公开/公告号US4656638A

    专利类型

  • 公开/公告日1987-04-07

    原文格式PDF

  • 申请/专利权人 XEROX CORPORATION;

    申请/专利号US19830466763

  • 发明设计人 PETER TIHANYI;ROBERT S. BAUER;

    申请日1983-02-14

  • 分类号H01S3/19;

  • 国家 US

  • 入库时间 2022-08-22 07:09:26

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