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Method and apparatus for measuring minority carrier lifetime in a direct band-gap semiconductor

机译:测量直接带隙半导体中少数载流子寿命的方法和装置

摘要

A direct band-gap semiconductor (54) is exposed to intensity- modulated photon radiation (56) having a characteristic energy at least as great as the energy gap of the semiconductor. This produces a time- dependent concentration of excess charge carriers through the material, producing a luminescence signal (58) modulated at the same frequency as the incident radiation but shifted in phase by an amount related to the lifetime of minority carriers. In a preferred embodiment, the phase shift of the luminescence signal is determined by transforming it to a modulated electrical signal and mixing the electrical signal with a reference signal modulated at the same frequency and having a phase which is known relative to the incident radiation. Minority carrier lifetime is calculated by integrating a direct current component of the mixed signal (F.sub.dc) over a 2&pgr; range in phase of the reference signal.
机译:直接带隙半导体(54)暴露于具有至少与半导体的能隙一样大的特征能量的强度调制的光子辐射(56)。这产生穿过材料的过量电荷载流子随时间的浓度,产生发光信号(58),该信号以与入射辐射相同的频率调制,但相移了与少数载流子的寿命有关的量。在优选的实施例中,通过将发光信号转换成调制的电信号并将该电信号与以相同频率调制并且具有相对于入射辐射已知的相位的参考信号进行混合来确定发光信号的相移。少数载流子寿命是通过将混合信号(Fdc)的直流分量在2pgr以上积分得到的。参考信号的相位范围。

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