FIELD-EMISSION SCANNING AUGER ELECTRON MICROSCOPE

摘要

A B S T R A C TField-Emission Scanning Auger Electron MicroscopeThe Auger electron microscope is equipped with afield-emission tip (10) maintained at an essentiallyconstant distance above the surface of the specimen (7).The tip (10) may consist of a tungsten (100) whiskerhaving a radius of ~50 nm at the apex, the workingdistance being on the order of 1mm. Auger electronsemitted from the surface of the specimen (7) are collect-ed by an electron energy analyzer (11) for conventionalprocessing. Mutual scanning displacement between tip (10)and specimen (7) is obtained by an xyz-drive module (6)which is also responsible for adjusting the workingdistance of the tip (10). The entire microscope set-up ismounted on vibration damping means (4, 5) and may beinserted into a vacuum system by means of an appropriateflange (1), if need be.