FIELD-EMISSION SCANNING/AUGER ELECTRON MICROSCOPE

摘要

pThe Auger electron microscope is equipped with a field-emission tip (10) maintained at an essentially constant distance above the surface of the specimen (7). The tip (10) may consist of a tungsten (100) whisker having a radius of SIMILAR 50 nm at the apex, the working distance being on the order of 1mm. Auger electrons emitted from the surface of the specimen (7) are collected by an electron energy analyzer (11) for conventional processing. Mutual scanning displacement between tip (10) and specimen (7) is obtained by an xyz-drive module (6) which is also responsible for adjusting the working distance of the tip (10). The entire microscope set-up is mounted on vibration damping means (4, 5) and may be inserted into a vacuum system by means of an appropriate flange (1), if need be. /p[EP0189498A1]