PURPOSE:To eliminate the need for using a check valve by providing two or more bimorph forming parts which are partly formed in a fixed condition in a fluid passage so as to cause displacement in directions in which a fluid feeding part and a fluid discharging port exist. CONSTITUTION:Two independent bimorphs 13, 14 in each of which electrodes 12 are formed in three layers are provided in a fluid passage 11. A fluid feeding port 15 and a fluid discharging port 16 are provided on the sides to which the bimorphs 13, 14 are displaced. Hence, the bimorphs 13 and 14 can be independently driven, and with difference in time between the two. Thereby, a fluid can be made flow in a defined direction, entirely eliminating the need for providing a valve for preventing backward flow.
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