Piezoelectric Micro-Pump Suction Cup Design and Research on the Optimal Static Driving Characteristics

摘要

This paper first introduces the design and principles of a negative pressure suction cup with integrated piezoelectric valveless micro-pump. Laser engraving technique is used to build the multilayer prototype. In order to improve the adsorption performance of the suction cup, the static driving characteristics of the piezoelectric actuator have been optimized: based on a series of assumptions according to piezoelectric composite oscillators, a theoretical mechanics model of circular single-chip piezoelectric actuator has been constructed to explore the lateral deformation of the piezoelectric actuator in the effect of simple electric load. By the method of finite element simulation, the model is verified. Further, through optimizing its geometry design, the piezoelectric actuator has been enabled of the best static deformation characteristics.