PURPOSE:To improve the running time of a device by extending the cleaning period associated with the contamination of an arc chamber by heating a heater housed in the inner wall surface of the arc chamber. CONSTITUTION:A heater 15 for heating the inner wall of the arc chamber 3 is provided in the wall of the inner chamber 3. Heating the inner wall of the arc chamber 3 by the energization of the heater 15, ions and ion sources which have not been made into an ion beam can be discharged outside without being made to adhere to the arc chamber 3. Ions and ion sources which have adhered to the arc chamber on the other hand are not solidified but discharged in a gaseous condition by the heating of the inner wall of the arc chamber. This eliminates the lowering of the running time due to frequent cleanings necessitated by the contamination of the inner wall of the arc chamber 3, extends the cleaning period, and improves the running time.
展开▼
